HORIBA offer a comprehensive range of fluid control and analytical solutions to improve yield, increase throughput and add value to your Bio Technology Process.
HORIBA group companies are able to provide complete flow control system for controlling the gas mixture entering the Bioreactor or culture tank using our range of mass flow controllers.
HORIBA Advanced Techno concentration monitors and products can be used for monitoring various parameters during the Bio Technology process, including pH, dissolved oxygen and concentration of the Bio reactor broth.
化学气相沉积(CVD)是一种通常在真空下生产高质量、高性能固体材料的沉积方法。该工艺通常用于制造半导体和薄膜生产。
在典型的化学气相沉积中,基板接触一种或多种挥发性前驱体,前驱体在基板表面发生反应和/或分解,产生所需的沉积物。根据化学气相沉积的基本原理,化学气相沉积有一系列扩展工艺,最常见的有:
常压化学气相沉积法(APCVD)
低压化学气相沉积法(LPCVD)
超高真空化学气相沉积法(UHVCVD)
气溶胶辅助化学气相沉积法(AACVD)
直接液体注入式化学气相沉积法(DLICVD)
等离子体增强化学气相沉积积法(PECVD)
远程等离子体增强化学气相沉积法(RPECVD)
原子层沉积法
金属有机物化学气相沉积法(MOCVD)
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