Semiconductors

Thin film analysis in liquid

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Analysis using a spectroscopic ellipsometer liquid measurement cell

Swelling of thin polymer films in liquid can be easily evaluated.

Spectroscopic Ellipsometer UVISEL Plus

  • Evaluation of optical constants for film thickness on the order of Å
    The phase modulation method and temperature control function, which do not involve mechanical movement, suppress the effects of vibrations and enable reliable evaluation with a high signal-to-noise ratio.
  • Film thickness evaluation up to 85 μm (depending on film condition)
    High wavelength resolution and unique optical system enable film thickness evaluation over a wide range.
UVISEL Plus
UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

» Link to Spectroscopic Ellipsometry

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