HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

A conductivity meter ideal for the concentration management of slurry, featuring a highly chemical resistant flat carbon sensor.

By maintaining the appropriate conductivity values, it contributes to the stabilization of slurry dilution levels and the polishing process of the wafers.

Segment: Semiconductor

Division: Wet Process Control

Fabricant: HORIBA Advanced Techno Co., Ltd.

High stability

Measurement ranges are 0−2,000 μS/cm and 0−10,000 μS/cm, with a repeatability of ±0.5% F/S and ±1.0% F/S, respectively, demonstrating high stability.

Metal contamination-free

With the use of a special carbon material as the electrode, there is no concern of metal contamination.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics.

■Specification conveter

Product name		Conductivity meter
Model		HE-960LF
Measurement method		Electrode type（2-electrode method）
Temperature specifications sensor		Platinum resistance 1000Ω/℃
Measurement range	Cell constant	0.1/cm		1.0/cm
	Conductivity	0.00 to 20.00μS/cm		0.0 to 200.0μS/cm
		0.0 to 200.0μS/cm		0 to 2000μS/cm
		0 to 1000μS/cm		0 to 10000μS/cm
		＊Measuring range of raw conductivity Switched with setting change
	Temperature	0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected.
Concentration conversion	Option 1,2	0 to 10.000% Conversion formula is defined by user (temperature compensation and concentration conversion)
Repeatability	Cell constant	0.1/cm	1.0/cm
	Conductivity	0.00 to 20.00μS/cm range	0.0 to 200.0μS/cm range	Within ±0.5% full scale
		0.0 to 200.0μS/cm range	0 to 2000μS/cm range	Within ±0.5% full scale
		0 to 1000μS/cm range	0 to 10000μS/cm range	Within ±1.0% full scale
	Temperature	±0.5℃
	Condition	Equivalent input
Linearity	Cell constant	0.1/cm	1.0/cm
	Conductivity	0.00 to 20.00μS/cm range	0.0 to 200.0μS/cm range	Within ±0.5% full scale
		0.0 to 200.0μS/cm range	0 to 2000μS/cm range	Within ±0.5% full scale
		0 to 1000μS/cm range	0 to 10000μS/cm range	Within ±1.0% full scale
	Temperature	±0.5℃
	Condition	Equivalent input
Transmission output		Number of output：4 DC4 to 20mA / 0 to 20mA input/output isolated type Maximum load resistance : 900Ω Transmission output range : Free setting within measuring range (Negative terminals of each transmission output channel are connected inside and thus have the same electrical potential.)
Contact output		Number of relay：5 ALARM contact R1,R2,R3 and R4 Contact type relay : Relay contact, SPST (1a） Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) Contact function Upper or lower ON/OFF alarm each measurement items. Contact action Closed when status is in the event. Opened when any erroneous status is normal or power is down. R1,R2 and R3 share a common terminal. Self diagnosis contact RF Contact type : relay contact , SPDT (1c) Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) C-NO contact action : Closed when status is normal. Opened when any erroneous status is detected or power is down. R4 and RF share a common terminal.
Contact input		Number of input：1
		Contact type：open collector. No-voltage contact
		Function : Hold command
Communication output		RS-485 communication
Self-check		Sensor diagnosis (Short-circuit and disconnection of the temperature sensor). Converter error
Temperature compensation of conductivity		● Arbitrary temperature coefficient entry (reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃） ● Arbitrary temperature compensation formula entry (reference temperature : 25℃, formula is defined by user) ● No temperature compensation is performed.
Temperature compensation range		0 to 100℃ The temperature compensation under 0℃ and over 100℃ is expanded by a function
Ambient temperature		5 to 45℃
Relative humidity		－25 to 65℃
Power supply		Rated voltage 24 V DC, 10W (max.)
Structure		Indoor-use panel installation type Panel case ： ABS, terminal : PBT Panel : IP65 dust and water proof structure
Conforming standards		CE Marking		EMC Directive : EN61326-2-3
Conforming standards		FCC Rule		FCC Part15
Mass		Approx. 550g
External dimensions		96 (W) × 96 (H) × 115 (D) mm Case depth : approx. 105mm (when panel-mounted）
Compatible sensors		FS-09F-1/2

■Specification sensor

Model	FS-09F-1/2	FS-09F-1/2-200
Wetted material	Glass carbon, PFA. Kalrez® 6375
pipe size	1/2 inch
Flow rate	0L/min to 10 Keep enough flow rate to measure latest sample.
Sample pressure	0 to 0.3MPa (Temperature : 20 to 30 degree℃）
Sample temperature	20～30 degree℃ If the difference between the ambient temperature and the sample liquid temperature is 5 degree℃, a measurement error of about 1 degree℃ will occur.
Cable length	Approx. 3.5m