S600 Series

Digital Mass Flow Controller

The S600 Series is designed by HORIBA STEC and manufactured by HORIBA Precision Instruments to emphasize its cost reduction capabilities in your process. The S600 Series is suitable for a large variety of industries and applications. The S600 Series can control a wide range of flows: from 3 SCCM to 500 SLM and has various types of communications available i.e. Analog, RS485, DeviceNet™, PROFIBUS™, and EtherCAT®. The S600 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response.

*1 Excluding S600-DR Series

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA Precision Instruments (Beijing) Co., Ltd.
  • Wide range of control, from micro to large flow, 3 SCCM to 500 SLM(N2)
  • Wide variety of communications and power supply (Analog 0-5V/RS485/PROFIBUS/DeviceNet/EtherCAT)
  • High S.P. accuracy:  +/- 1.0% S.P. (*1)
  • 1.5 second response (*1)
     

*1 Excluding S600-DR Series
 

Applications

Models Select communication mode Select power supply
S600-2*2 series Digital communication
▶RS485 F-NET Protocol
Analog communication
▶0~5VDC		 ±15V(±5%) or 24VDC
HORIBA’s lineup includes power supply MT-51D series
S600-226 series PROFIBUSTM communication
Analog communication
▶0~5VDC		 Confirming to PROFIBUSTM standards
HORIBA’s lineup includes power supply MT-51D series
S600-624 series DeviceNetTM communication Confirming to ODVA standards
S600-624 series EtherCAT® communication Confirming to EtherCAT® standards 24VDC
Size: 2.15 MB
Digital Mass Flow Controller S600 Series Brochure

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.