Analysis using a spectroscopic ellipsometer liquid measurement cell
Swelling of thin polymer films in liquid can be easily evaluated.
Spectroscopic Ellipsometer UVISEL Plus
Evaluation of optical constants for film thickness on the order of Å The phase modulation method and temperature control function, which do not involve mechanical movement, suppress the effects of vibrations and enable reliable evaluation with a high signal-to-noise ratio.
Film thickness evaluation up to 85 μm (depending on film condition) High wavelength resolution and unique optical system enable film thickness evaluation over a wide range.