*1 Flow rate accuracy is traceable only down to 2 SCCM, hence actual gas accuracy not guaranteed below 2 SCCM.
*2 This is guaranteed value under 25 ℃ and ≤ 1.0 × 10-3 Pa (A).
*3 Setting time is MFC output signal and N2 gas. Other detail definition follows setting time of "SEMI Standard E17-1011 Section 4.1.4".
*4 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec (±10 PSI/sec).
*5 EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.
*1 Flow rate accuracy and repeatability of Bin#14-15 are guaranteed only for N2 calibration gas.
*2 This is guaranteed value under 25 ℃ and ≤ 1.0 × 10-3 Pa (A).
*3 Setting time is MFC output signal and N2 gas. Other detail definition follows setting time of "SEMI Standard E17-1011 Section 4.1.4".
*4 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec (±10 PSI/sec).
*5 EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.