Model

VC-1310

VC-1410

Flow rate generated^*1 (During TEOS generation)

1.0 CCM or less (liquid phase conversion)

Max. 5.0 CCM conversion (liquid phase conversion)

Liquids supported

All liquids except those corrosive to stainless steel (ex, HCl and HF)

Temperature rise

Max. 150°C

Pressure generated^*1

Reduced pressure

Leak Integrity

External leak: 1.0 x 10^-8 Pa·m³/s (He) or less; Internal leak: 1 x 10^-6 Pa·m³/s (He) or less

Materials in gas contact area

SUS316L (PTFE)

Internal heater volume

AC 100 V, 70 W (35 W x 2)

Temperature sensor used

Thermocouple K type (CA)

Pressure Resistance

1.0 MPa (G)

Standard Fitting

Liquid inlet: 1/16" special joint, 1/8" VCR type male, 1/8" Swagelok type; Gas outlet: 1/4" VCR type male, 1/4" VCR type female

*1 Varies depending on the type of liquid.

*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa).