Model | CS-152 | CS-152C | |
Model specifications | No cooling unit | Integrated cooling unit | |
Measurement sample | SC-2 (Hydrochloric acid/Hydrogen peroxide aqueous solution) | ||
Measurement principle | Absorption spectrometry | ||
Concentration computation principle | Temperature-compensated multivariate analysis | ||
Measurement range | HCl: 0.00 to 2.00 %/0.00 to 10.00 % | ||
Reproducibility | HCl: ±0.15 %/±0.20 % | ||
(Peak to peak)
| H2O2: ±0.15 %/±0.20 % | ||
Chemical conditions
| Temperature | 20 to 30 °C | 20 to 80 °C |
Flow rate | 20 to 60 ml/min. | 20 to 40 ml/min. | |
Pressure | 0.10 to 0.20 MPa | ||
Measurement cycle | Approx. 3 seconds minimum | ||
Equipment temperature | 20 to 25 °C | ||
Operation panel | 1)Temperature level display: 2)Alarm display (Hydrochloric acid, Hydrogen peroxide): 3)Alarm value settings (Hydrochloric acid, Hydrogen peroxide): | ||
Serial input/output | RS-232C 2)Alarm value settings (Hydrochloric acid, Hydrogen peroxide): | ||
Parallel input | 12 to 30 V DC (photocoupler insulated) | ||
Parallel output | Maximum current when open collector output is ON: 5 mA 1)Alarm output (Hydrochloric acid, Hydrogen peroxide): 2)Device error (including liquid leakage) 3)Under measurement | ||
Analog output | 4 to 20 mA (2 outputs: HCl concentration, H2O concentration | ||
Power | 24 V DC ±10%, 2 A | ||
Dimensions | 205 (W) x 329 (D) x 269 (H) mm | 291 (W) x 329 (D) x 269 (H) mm | |
Mass | Approx. 11 kg | Approx. 12 kg | |
Connection pipe size | For inlet and outlet: Outer diameter 3 mm (inner diameter 2 mm) | ||
Pipe connection | Nippon Pillar Super type | ||
Utilities | Instrumentation air for driving air valve: | ||
SC-2 농도 모니터, CS-152
CS-152은, 반도체제조의 세정 공정의 SC-2용액용으로, 고정밀도인 약액농도 모니터에서, 종래에 없는 고속응답성과 컴팩트화를 실현. 금속 이온 제거에 사용되는 SC-2용액(HCl/H2O2/H2O)의 각 성분농도를 실시간으로 측정하고, 알람에서 자동보급하는 타이밍을 알립니다. 짧은 측정 주기의 실현에 의해 농도변화에 대하여도 충실하게 대응하고,또 컴팩트 설계에 의해 용이하게 세정 장치에 짜 넣을 수 있습니다.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Short 3-second measurement cycle supports concentration control for 300-mm processes
A short measurement cycle of approximately three seconds makes it possible to track concentrations very close to real time. Supports fine-tuned concentration control for batch-type-bath as well as single-bath cleaning devices. - Compact design helps reduce cleaning-device footprint
The compact design reduces the monitor's footprint by about a third*, reducing the amount of space required by the cleaning device. The monitor is easily integrated with the cleaning device.
*Based on comparison with the HORIBA CS-342 series. - Reduces lot defects in the cleaning process for improved yield
Output from the monitor is used for automated spiking control of the SC-2 solutions, enabling cleaning with a high reproducibility rate. As a result, lot defects decrease in the cleaning process, which helps to boost the overall yield. - Fully automatic measurement and simple control
All the user has to do is set up the SC-2 solution supply. Measurement is fully automatic, so no user control is required once the measurement has begun. Air is used for reference spectral measurement, removing the need for a utility water supply. - Comprehensive measures to eliminate air bubbles enable measurement of high-temperature samples
A built-in bubble removal function removes air bubbles immediately before the flow cell, allowing continuous measurement of the solution as it is flowing. If the monitor has an integrated cooling unit, high-temperature samples can be sent directly to the monitor. Temperature compensation is carried out automatically. - The monitor uses a low-voltage (24 V DC) with a load of approximatley 45 W gives good energy efficiency. An internal leakage sensor is installed to detect solution leaks, so that the supply of SC-2 solutions can be shut off in the event of an emergency.