제품사양 | CS-131: No cooling unit CS-131C: cooling unit 일체형 |
측정대상 | SC-1 (암모니아/과산화수소수 용액) |
측정원리 | 흡수분광법 Absorption spectrometry |
농도산출원리 | 온도보상형 다변량 해석법 |
측정범위 | NH3: 0.00 to 5.00% H2O2: 0.0 to 10.00% H2O: 85.0 to 100.0%
|
Reproducibility (Peak to peak) | NH3: ± 0.25% H2O2: ± 0.3% H2O: ± 1.5% |
Chemical conditions | CS-131: Temperature: 20 to 30°C Flow rate: 20 to 60 mL/min. Pressure: 0.10 to 0.20 MPa CS-131C: Temperature: 20 to 80°C Flow rate: 20 to 40 mL/min. Pressure: 0.10 to 0.20 MPa |
Measurement cycle | Approx. 2 seconds minimum (not including chemical replacement and cooling times) |
Equipment temperature | 20 to 25 |
Operation panel | 1) Temperature level display: Ammonia, hydrogen peroxide, water 2) Alarm display: Ammonia, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit 3) Alarm value settings: Ammonia, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit |
Serial input/output | RS-232C 1) Concentration data: Ammonia, hydrogen peroxide 2) Alarm value settings: Ammonia, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit Parallel input 12 to 30 V DC (photocoupler insulated) Parallel concentration alarm (ON/OFF) |
Parallel output | Maximum current when open collector output is ON: 5 mA Maximum voltage when open collector output is OFF: 30 V 1) Alarm output: Ammonia, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit 2) Device error 3) Liquid leakage |
Analog output | 4 to 20 mA (2 outputs: NH3 concentration, H2O2 concentration) *Regardless of the range specifications, the output of 4 ~ 20 mA can be made to correspond to 0 ~ 10% concentrations. |
Power supply | 24 V DC ± 10%, 2 A |
Dimensions | CS-131: 205 (W) x 329 (D) x 269 (H) mm CS-131C: 291 (W) x 329 (D) x 269 (H) mm |
Weight | CS-131: Approx. 11 kg CS-131C: Approx. 12 kg |
Connection pipe size | For input and exhaust: Outer diameter 3 mm (inner diameter 2 mm) |
Pipe connection | Nippon Pillar Super type |
SC-1 모니터, CS-131
CS-131은, 반도체제조의 세정 공정에서 SC-1용액의 약액농도 모니터로, 종래에 없는 고속응답성과 컴팩트화를 실현. 파티클(particle)이나 유기물의 제거에 사용되는 SC-1용액(NH3/H2O2/H2O)의 각 성분농도를 상시 모니터 합니다. 모니터 출력을 채용하고있고, 피드백 제어로 행하는 것에 의해, SC-1용액의 농도를 허용 범위에 유지하는 동시에 쓸데 없는 용액교환을 없앨 수 있습니다. 또 냉각기일체형도 라인 업하고, 광범위한 샘플 온도범위에 대응했습니다.
Segment:
Semiconductor
Division:
Wet Process Control
Manufacturing Company:
HORIBA Advanced Techno Co., Ltd.