HORIBA is one of the world's largest gas and liquid mass flow controller manufacturers, with a range of analogue, digital and high temperature mass flow controllers along with the point of use liquid source vaporization control and delivery systems.
HORIBA can deliver the critical control needed for the success in your coating industry manufacturing lines such as Chemical vapour deposition (CVD), Atomic layer deposition (ALD), metal organic chemical vapour deposition (MOCVD), PVD (physical vapour deposition), Plasma enhanced chemical vapour deposition (PECVD) and Diamond layer or Diamond layer coating (DLC). We offer a comprehensive range of fluid control and process monitoring to improve yield, increase throughput and add value to your Coating Process.
HORIBA has one of the world’s smallest quadrupole mass spectrometers allowing it to operate at a much higher pressures (1 Pa) than the larger traditional systems. This results in a reduction in the need for additional pumping equipment.
發射光譜和MWL測量的終端與腔室健康監測
Optical Emission Spectroscopy Etching End-point Monitor
Vapor Concentration Monitor
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
即時雷射測量監控系統
Quadrupole Mass Analyzer
Plasma Emission Controller
Vapor Concentration Controller
Capacitance Manometer
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