GD-Profiler 2™
The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin and thick films characterization and process studies.
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We introduce an analysis method that allows for the rapid and easy determination of the depth-directional distribution of elements in compound semiconductor thin films, where performance varies significantly depending on the composition ratio of elements.
Pulsed-RF Glow Discharge Optical Emission Spectrometer
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