It took just 30 seconds to discover that there were differences in the amounts of Al, H, and O near the GaN surface. The Marcus high-frequency glow discharge luminescent surface analyzer enables elemental analysis in the depth direction from the sample surface at a sputtering rate on the order of μm/min.
Comparison of analysis results between good and defective GaN products
Pulsed-RF Glow Discharge Optical Emission Spectrometer
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