CS-700

高精度、高穩定性化學濃度監測儀

能夠準確測量半導體製造過程所使用的混合溶液中各成分的濃度。

非常適合控制多組分化學品。它有助於加強半導體製造流程的品質控制，同時提高化學品管理的準確性。

製造商: HORIBA Advanced Techno Co., Ltd.

Compatible with Multi-component Chemicals
Accurate measure mixtures of up to eight components of chemicals can be taken.

Zero Reagent Requirements
Since component separation is accomplished through an optical measurement method without the need for reagents, it also contributes to cost reduction in the production process.

Measurement Range and Repeatability

Unit : mass%

	Component	Measurable range	Repeatability
1st solution	HNO₃	30.0 - 34.0	±0.5
	HF	2.00 - 4.00	±0.10
	H₃PO₄	35.0 - 39.0	±0.6
	H₂SiF₆	0.00 - 3.00	±0.50
	H₂O	25.0 - 33.0	±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

item	CS-100	CS-700
Measurement principle	Absorption spectroscopic method	Absorption spectroscopic method
Sample temperature	20 to 30 Degree C	20 to 30 Degree C
Ambient temperature	20 to 25 Degree C	20 to 30 Degree C
Components	Max. 4 components	Max. 8 components
Chemical range	Max. 4 ranges	Max. 6 ranges
Communication	Parallel I/O, Analog output, RS-232C	Parallel I/O, Analog output, RS-232C
Analog output (4-20 mA)	Max. 2 components	Max. 6 components
Dimension	205(W) X 329(D) X 269(H)mm	218(W) X 391(D) X 213(H)mm
Power source	DC 24V	DC 24V(Same connecter of CS-100)
Consumable parts	Halogen lamp	Halogen lamp (Same as CS-100 type)
Wavelength	UV/NIR	UV/NIR
Wetted material	PTFE, PFA, Sapphire or Quartz,	PTFE, PFA, Sapphire, Kalrez 4079 O-ring