HE-960LC

碳感測器電導率儀

低濃度電導率計，採用高度耐化學腐蝕的碳感測器。

非常適合半導體製造和 FPD（平板顯示器）製造過程中的化學品和純水回收。採用耐化學腐蝕的二極碳感測器，測量化學品的電導率，適用於濃度管理、化學品稀釋管理以及各種製程中超純水回收的監控。

製造商: HORIBA Advanced Techno Co., Ltd.

Sensor with Excellent Chemical Resistance
The sensor employs a chemically resistant two-pole flow-through carbon sensor, making it compatible with a wide range of chemicals used in semiconductor cleaning processes.

Metal Contamination-free
With the use of a special carbon material as the electrode, there is no concern of metal contamination.

Wide-range Compatible
Capable of measuring up to a maximum of 1000 μS/cm (measuring range of conductivity before temperature compensation).

Concentration Conversion Function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemicals.

Specificationd of HE-960LC
Model	HE-960LC
Measurement range	0 - 1000 μS/cm (cell constant: 0.1/cm)*
Measurement range	0 - 10000 μS/cm (cell constant: 1/cm)*
Repeatability	Cell constant	0.1/cm	1.0/cm
	0 to 1000 µS/cm	+/- 0.5% FS	-
	0 to 2000 µS/cm	-	+/- 0.5% FS
	2000 to 10000 µS/cm	-	+/- 0.5% FS
	0.0 to 100 deg.C	+/- 0.5 deg.C