HD-960L

Dissolved Oxygen Monitor in Low Concentration HF HD-960L

HF（氫氟酸）DO（溶氧）監測儀/純水DO（溶氧）監測儀

這是一款專為低流量應用而設計的溶解氧監測儀，非常適合在濕式製程中監測 HF 溶液中的溶氧濃度。

配備量程切換功能，始終以最佳量程/分辨率測量從低到高的溶解氧濃度，使其能夠適應每個製程的特定測量要求。

事業部: Semiconductor

產品分類: Wet Process Control

製造商: HORIBA Advanced Techno Co., Ltd.

Automatic Range Switching
Automatically switches between three measurement ranges, from μg/L order to mg/L order, enabling optimal resolution measurements.

Suitable for Measuring Small Sample Volumes
Can measure flow rates as low as 15 mL/min.

Simple Calibration Function
Equipped with zero calibration for electricity and zero/span calibration functions for gas.

Model Name	HD-960L
Measurement range Repeatability	Measurement range	Repeatability
	0.0 to 200.0 μg/L	+/-1% FS
	200 to 2000μg/L	+/-1% FS
	2.00 to 20.00mg/L	+/-1% FS
Conditions measurement sample	Sample Pressure	0 to 0.1MPa
	Sample flow rate	15 to 200ml /min.
	Sample temperature	10 to 45 °C
	Sample HF concentration	0 to 5000ppm
Transmission output	4-20mA, 4points
Contact output	4 points
Power supply	DC24V +/- 10% 15W
Combined Sensor unit	DO-100
Combined Sensor	#5600
Sample inlet/outlet	1/4 inch tube

Schematics

〈Catalog〉For Semiconductor Manufacturing Process Dissolved Oxygen in Low Concentration HF Meter HD-960L

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