HZ-960HPO-M

Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M

H2O2 監測儀

過氧化氫溶液濃度監測儀,用於半導體和太陽能電池的清潔過程,以去除顆粒和金屬離子雜質。

能夠高精度測量過氧化氫溶液濃度,最小解析度為 1 ppm,適合低濃度化學處理。

H2O2

DC24VTransmission OutputContact OutputLow Concentration

事業部: Semiconductor
產品分類: Wet Process Control
製造商: HORIBA Advanced Techno Co., Ltd.

Abundance of Measurement Options

In addition to the standard measurement range of 0–1 mass% for hydrogen peroxide, there are three additional measurement ranges available.   Recommendations for the optimal range will be provided.

Choice of Pipe Sizes

In addition to the standard 3/4-inch size, 1/2-inch and 1-inch sizes can be chosen.

High reproducibility and stability accuracy are ensured.

The reproducibility accuracy is within FS+/- 0.2%.

Specifications of HZ-960HPO-M
Corresponding detectorZH-10HPOZH-40HPOZH-100HPOZH-500HPO
Measurement range0 - 1000 ppm0 - 4000 ppm0 - 1%0 - 5%
Supply temperature5 - 30 deg.C5 - 80 deg.C
Chemical contact material of detectorPFA, PTFE, quartz glass
Supply pressureWithin 0.5 MPa
Repeatability+/- 0.2% of full scale
Linearity+/- 1.0% of full scale
Transmission outputNumber of output: 2
Contact inputNumber of output: 5
Communication outputRS-485
Power supplyRated voltage 24 +/- 10% V DC, 15W

Schematics

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