大流量液源汽化控制系統
高流量、高效率的液體蒸發器，其流道和加熱器元件嵌入鑄鋁塊中，可確保最大程度的傳熱，並消除冷凝的風險。此液體源蒸發控制系統可在高達 300 °C 的溫度下運行，並且可蒸發高達 30 克/分鐘的 IPA（或同等物質）。
| Application liquid | H2O/IPA/TEOS/SiCl4 Please contact HORIBA if you require vaporizing any liquid materials that are not listed here. |
| Maximum vaporization volume (gas flow rate) | H2O : 10g/min (12.4 SLM) IPA ： 30g/min (11.1 SLM） TEOS : 50g/min（5.3 SLM） SiCl4 ： 130g/min（17.1 SLM） |
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High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
Digital Liquid Mass Flow Meters / Controllers
Compact Baking System
Liquid Auto Refill System
Mixed Injection System Liquid Vaporizers
Mixed Injection System Liquid Vaporizer
High Temperature Digital Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
Direct Liquid Injection System
Capacitance Manometer
Pressure Insensitive Mass Flow Module
Constant Volume Sampler
Micro Flow Pressure Insensitive Mass Flow Module
Ultrasonic Exhaust Flow Meter
Fuel Flow Measurement Systems
Hydrogen Fuel Flow Meter
Digital Liquid Mass Flow Meters / Controllers
Compact Baking System
Liquid Auto Refill System
Mixed Injection System Liquid Vaporizers
Mixed Injection System Liquid Vaporizer
Pitot Tube Exhaust Flow Meter
Dual Pitot Tube Exhaust Flow Meter
High Temperature Digital Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
Pressure Insensitive Mass Flow Controller
Direct Liquid Injection System
Direct Liquid Injection System
