HORIBA 是高性能汽化器的領先供應商之一。 HORIBA 的液體源蒸發器用於整個半導體製造過程,以安全高效地將氣相液體輸送到使用點。無論液體前驅物需要在真空或大氣壓力下汽化,
HORIBA 都可以提供汽化技術來滿足您的要求。 HORIBA 擁有 30 多年的汽化專業知識,採用直接噴射、混合噴射、加熱汽化技術。
HORIBA 的汽化解決方案範圍從幾克/分鐘到 >25 克/分鐘。作為解決方案供應商,我們不僅可以推薦 VC 和 MV 系列等汽化組件,還可以提供 LSC / LU 等完全整合的系統。透過將我們世界領先的氣體和液體質量流量控制器和儀器與我們的蒸發器結合使用,使用者可以確保關鍵製程化學品的精確且可重複的蒸發。
The graph in the left shows the different possible states of matter. There are two ways to get from a liquid to a gaseous state. The first method involves increasing the temperature while holding the pressure steady, as indicated by the arrow with the broken line . This method is commonly used in everyday settings—to boil water and convert it to steam, for example. Heating a liquid takes time, however, which makes rapid vaporization difficult. On the other hand, one can also heat the liquid in advance and then abruptly reduce the pressure, as illustrated by the arrow with the solid line . The pressure in the vaporization section of the injector can be reduced instantaneously, and this makes it possible to vaporize a liquid source instantaneously.
Mixed Injection System Liquid Vaporizer
Compact Baking System
Direct Liquid Injection System
大流量液源汽化控制系統
Liquid Auto Refill System
Digital Liquid Mass Flow Meters / Controllers
如您有任何疑問,请在此留下詳細需求或問題,我們將竭誠您服務。