高速精密壓力式質量流量模組
關鍵的半導體製造流程不斷需要精密的氣體流量控制設備,以實現產品的創新以及前緣記憶體和邏輯元件從實驗室到工廠的量產。 HORIBA 發表的新型 MFC D700MG,它是 D500MG 的向上相容型號,以支援客戶的挑戰。
請選擇一個本產品可販售的國家或區域:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
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On-Tool Gas and Full Scale Configuration Change *Only EtherCAT
Provide flexibility to process optimization
100ms Step-up Response & MFC-to-MFC deviation control
Deliver high productivity and greater process performance
MRMG functionality for small flow rate(Bin101 – Bin105)
Provide flexibility to process requiring small flow rate
Better Valve Shut-off and Corrosion Resistance by PFA nozzle
Robustness with less particle risk reduce down time and optimize yield
State Monitor Function
Provide more internal data for smarter failure prediction
Output items of state monitor function |
Flow/Pressure zero adjustment counts |
Valve drive counts |
Record of max/min P0,P1,P2 pressure |
Record of max/min Block temperature |
Total time over/below pressure spec. |
Total time over/below temperature spec. |
Total working time |
Total control time |
Total flow time (per calibration instance) |
Total flow rate (per calibration instance) |
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Pressure Insensitive Mass Flow Module
Constant Volume Sampler
Micro Flow Pressure Insensitive Mass Flow Module
Ultrasonic Exhaust Flow Meter
Fuel Flow Measurement Systems
Hydrogen Fuel Flow Meter
Digital Liquid Mass Flow Meters / Controllers
Compact Baking System
Liquid Auto Refill System
Mixed Injection System Liquid Vaporizers
Mixed Injection System Liquid Vaporizer
Pitot Tube Exhaust Flow Meter
Dual Pitot Tube Exhaust Flow Meter
High Temperature Digital Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
Pressure Insensitive Mass Flow Controller
Direct Liquid Injection System
Function Control Unit with Mass Flow Controllers
Automatic Span Gas Unit for Parallel calibration
Automatic Span Gas Unit for Serial calibration
Automatic Span Gas Unit Transferstandard
Automatic Span Gas Generator Unit for Quality control at field test
Pressure Insensitive Mass Flow Module
Micro Flow Pressure Insensitive Mass Flow Module
High Temperature Digital Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
Pressure Insensitive Mass Flow Controller
Capacitance Manometer