D700WR

寬範圍壓力式質量流量模組

D700WR 安裝了一款專為大範圍控制應用而設計的新型流量器,具有基於 CRITERION™ 技術的高精度性能。 D700WR可以將流量控制在全流量的0.1%以下,幫助使用者優化使用上的彈性。例如,如果系統安裝多個MFC用於高低流量控制,使用者可以減少MFC的數量並在同一位置使用另一個MFC用於不同的目的。

事業部: Semiconductor
產品分類: Fluid Control
製造商: HORIBA STEC, Co., Ltd.

請選擇一個本產品可販售的國家或區域:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
瀏覽完整列表 點擊此處.

  • 0.1~100% wide range control & high accuracy for low flow 

    • Provide flexibility to process optimization  

  • ≤ 500ms Step-up Response 

    • Deliver high productivity and greater process performance 

  • Zero failure robust CIP pressue sensor

    • Reduce down time and labor cost in high volume production 

  • 10x better valve shut-off and corrision resistance by PFA nozzle 

    • Robustness with less particle risk reduce down time and optimize yield

  • State Monitor Function 

    • Provide more internal data for smarter failure prediction  

Output items of State monitor function

Flow/Pressure zero adjustment counts 

Valve drive counts 

Record of max/min P0,P1,P2 pressure 

Record of max/min Block temperature 

Total time over/below pressure spec. 

Total time over/below temperature spec. 

Total working time 

Total control time 

Total flow time (per calibration instance) 

Total flow rate (per calibration instance) 

Go to External drawing

*1 Please contact us for supported kinds of gas and glowrates.
*2 This is guaranteed value under 25 ℃ and ≤ 1.0 × 10-3 Pa (A).
*3 Output noise is included in Repeatability.
*4 Setting time is MFC output signal and N2 gas at 23 ℃. Other detail definition follows setting time of "SEMI Standard E17-1011 Section 4.1.4".
*5 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec (±10 PSI/sec).
*6 The "(TYP.)" value is a representative ability value at the time of in-house verification.
*7 PFA means Poly [tetrafluoroethylene-co-perfluoro (alkyl vinyl ether)]
*8 PCTFE means Polychlorotrifluoroethylene.
*9 After installation, be sure to perform zero point adjustment refer to "D707WR Zero Adfustment Procedure".
*10 EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.

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如您有任何疑問,请在此留下詳細需求或問題,我們將竭誠您服務。

* 這些欄位為必填項目。

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