CS-100 Series

獨立式化學濃度監測儀

一系列用於濕式製程所使用的各種化學品的化學濃度監測儀。

可以從 100 多種不同的應用中選擇適合化學品的最佳模型。可以即時測量每種成分的濃度,並使用警報來發出通知,以指示化學交換和自動補充的時間。可以實現較短的測量週期,以即時地追蹤濃度變化。

Chemical Concentration

AC(100-240V)Transmission OutputContact OutputRS-232CMulti Component

事業部: Semiconductor
產品分類: Wet Process Control
製造商: HORIBA Advanced Techno Co., Ltd.

Real-time Concentration Tracking

Achieve concentration management for a 300mm process with measurement cycles of approximately 3 seconds. Supports precise concentration management for various types of cleaning equipment.

Simple Management

Measurement is fully automated, without the need for manual control once the measurement has started. Users can achieve easy management by simply injecting the chemical.  Furthermore, since reference spectrum measurements use air, water is not required as a utility for routine measurements.

Prevention of Bubbles

A degassing function has been incorporated to separate bubbles from liquids just before the flow cell.  Possible to take continuous measurements while the liquid is flowing.

Model name

CS-100
Measurement principleAbsorption spectroscopic method
Sample temperature20 to 30 Degree C
Ambient temperature20 to 25 Degree C
ComponentsMax. 4 components
Chemical rangeMax. 4 ranges
CommunicationParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 components
Dimension205(W) X 329(D) X 269(H)mm
Power sourceDC 24V
Consumable partsHalogen lamp
WavelengthUV/NIR
Wetted materialPTFE, PFA, Sapphire or Quartz

Schematics

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