CS-620F

光纖式熱磷酸濃度監測儀

無需冷卻即可即時測量高溫磷酸的磷酸濃度監測儀。

非常適合管理磷酸濃度，主要用於 3D NAND 閃存 SiN 層 1 的蝕刻工藝，這是半導體製造過程的一部分。 1 SiN層：在矽晶片和基板上形成的由矽和氮化合物組成的薄膜。

製造商: HORIBA Advanced Techno Co., Ltd.

High Concentration and High-temperature Compatibility
Capable of directly measuring high-concentration (up to 92%) and high-temperature phosphoric acid (140－170°C) in a circulation line without the need for cooling mechanisms or cooling time.

Low Contamination Risk
Using PFA at the sample connection point, contamination risk is reduced.

Acceleration of Feedback Control
Real-time measurements with data updates every 3 seconds have been implemented, achieving faster concentration feedback control.

Reduction in Equipment Downtime
The adoption of a semi-annual background adjustment cycle has contributed to the reduction of equipment downtime.

Product name	CHEMICAL SOLUTION MONITOR
Model	CS-620F
Measurement principle	Absorption spectroscopic method
Calculation principle	Temperature compensation type multivariate analysis
Sample	H₃PO₄/H₂O
Measurable range Repeatability		Component	Measurable range (mass%)	Repeatability (mass%)	Analog output range(mass%)
	1st solution	H₃PO₄	85.00-92.00	+/-0.10	85.00-100.00
	1st solution	H₂O	8.0-15.0	+/-0.3	0.0-15.0
	・ Repeatability is defined by maximum error from average (1 hour). ・ In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical, there is possibility of discrepancy (Maximum +/- 0.30%).
Conditions of Measurement	1) Measurement interval: Approx. 3 sec. (minimum) 2) Moving average: 16 times
Connection fitting size	1 inch or 3/4 inch
Sample condition	Sample temperature: 140 to 170°C Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour) Input pressure: 0.2 MPa or less Pressure fluctuation: 0.02 MPa or less Flow rate: 1 to 30 L/min
Air(for operation and purge)	Connection port: 4 mm O.D. quick joint Pressure: 0.2 MPa ± 0.02 MPa
Power source	100 to 230 V AC (Single-Phase), 50/60 Hz
Power consumption	Approx.85 VA (Transient electric current at the time of the start is excluded)
Communication	Parallel I/O, RS-232C, Analog output
Dimension	(Monitor) 200 (W) × 308 (D) × 78 (H) mm (Lamp unit) 200 (W) × 262 (D) × 100 (H) mm (Sample cell) 240 (W) × 209 (D) × 205 (H) mm
Weight	(Monitor) Approx.3.6 kg (Lamp unit) Approx.2.8 kg (Sample cell) Approx.3.0 kg
Ambient temperature	(Monitor, Lamp unit) 20 to 30°C (Optical fiber, Sample cell) 20 to 100°C * Sudden temperature change should be avoided, within +/- 1°C/1hour
Ambient humidity	(Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)
Slanting angle of installation	(Monitor, Lamp unit) Within +/-1 degree (Sample cell) Please install so that air bubbles do not stay up.
Optical fiber	Length: 5 m, Bend radius: R150 mm