HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

採用高耐化學性碳感測器的低濃度電導率計。

非常適合半導體濕式製程的化學測量。該裝置可測量電導率，非常適合製程中的濃度管理、化學品稀釋管理以及超純水回收監控。

製造商: HORIBA Advanced Techno Co., Ltd.

Sensor with Excellent Chemical Resistance and Pressure Resistance
By employing a special electrode, it is ideal for measuring the conductivity of DIW (de-ionized water) rinse after chemical processing and for measurements in the circulation line.

Metal Contamination-free
With the use of a special carbon material as the electrode, there is no concern of metal contamination.

Abundant Temperature Compensation Features
Choices can be made concerning temperature characteristics for ultra-pure water (reference temperature 25°C), NaCl temperature characteristics, and temperature compensation coefficients at the reference temperature. This allows for temperature compensation tailored to the liquid to be measured.

Sensor	ESH-01-L-GC5 (Cell constant : 0.1/cm)	ESH-1-L-GC9 (Cell constant : 1/cm)
Conductivity	0.00 to 20.00 µS/cm	0.0 to 200.0 µS/cm	0.0 to 200.0 µS/cm	0 to 2000 µS/cm	*1
	20.00 to 70.00 µS/cm	200.0 to 999.9 µS/cm	200.0 to 700.0µS/cm	2000 to 9999 µS/cm	*2
Repeatability	1 Within +/- 0.5% of the full scale 2 Within +/- 1.0% of the full scale

Sensor

ESH-01-L-GC5

(Cell constant : 0.1/cm)

ESH-1-L-GC9

(Cell constant : 1/cm)

Conductivity

0.00 to 20.00 µS/cm

0.0 to 200.0 µS/cm

0 to 2000 µS/cm

20.00 to 70.00 µS/cm

200.0 to 999.9 µS/cm

200.0 to 700.0µS/cm