HE-480R(W)

用於半導體清洗製程的電阻率計

非常適合監測清潔過程中使用的超純水的純度。 由於其微處理器設計,它可以在過程中準確測量超純水。

這有助於對用作矽晶圓和其他應用的最終清洗水的超純水進行純度監測。

RESIST

DC24VTransmission OutputContact OutputSingle Component

事業部: Semiconductor
產品分類: Wet Process Control
製造商: HORIBA Advanced Techno Co., Ltd.

High Precision

Based on the temperature characteristics of ultra-pure water, the microprocessor calculates the temperature compensation coefficient and automatically converts it to a 25°C specific resistance.

High-precision Temperature Compensation

By using a platinum temperature sensor (Pt1000Ω) as the temperature compensation element, it allows for high-precision temperature compensation within the range of 0 to 100°C.

Abundant Temperature Compensation Features

Allowing for temperature compensation options such as pure water, ultra-pure water with impurities, and user-defined temperature compensation, enabling temperature compensation tailored to the liquid to be measured.

Product nameIndustrial resistance meter
ModelHE-480R
Measurement methodElectrode type (2-electrode method)
Cell constant0.01 / cm
Temperature sensor
specifications
Platinum resistance 1000 Ω / 0 °C
Measuring rangeMeasurement unitkΩ·m0 to 2.000 to 20.00 to 200.00 to 1000 *
MΩ·cm0 to 0.2000 to 2.000 to 20.000 to 100.0 *
*: Measurable without temperature compensation
Temperature: 0 °C to 100 °C (Select your desired decimal point from 0, 1, and 2 digits.)
Repeatability Within± 0.5 % of the full scale (in equivalent input)
Linearity Within± 0.5 % of the full scale (in equivalent input)
Transmission
output
4 mA to 20 mA DC: input / output isolated type
Maximum load resistance: 900 Ω
Transmission output range: Freely selectable within the measurement range
Contact outputOutputs: 2 points
Alarm contact output (R1 and R2)
Contact type: relay contact, SPDT (1c)
Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load)
Contact function: selectable from upper / lower limit operation (ON / OFF control), alarm, and maintenance.
Transmission
output hold feature
  • Previous value hold
  • Optional value hold
  • Continuous
Selectable from the above (However, only the previous value hold is available in the maintenance Mode.)
Self-diagnosis
function
  • Sensor diagnosis
  • Out of the measurement range
  • A/D converter scale over
  • Converter error
Temperature
compensation
  • Based on the temperature characteristics of extra deionized water (reference temperature: 25 °C)
  • Based on the reference temperature and user-defined temperature coefficient (reference temperature: 5 °C to 95 °C)
  • No temperature compensation
Temperature - compensated range0 °C to 100 °C
Power supplyRated voltage 100 V to 240 V AC, 50 / 60 Hz, 10 VA (max.)
StructureIndoor-use panel installation type
Panel: IP65 dust and water proof structure
Protective structurePanel: IP65 (IEC60529, JIS C0920)
Conforming standardsCE Marking
FCC Rule
External
dimensions
48 (W) mm x 96 (H) mm x 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)
MassApprox. 400 g
Compatible
sensors
ERF-series, cell constant 0.01 / cm

Schematics

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