HE-960H-TM

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

寬範圍 TMAH 濃度監測儀

TMAH 濃度監測儀非常適合顯影液 TMAH 濃度管理。

採用高度耐化學腐蝕的 4 極碳感測器，可在較寬的範圍內測量 TMAH 濃度（光阻顯影液的主要成分）。

事業部: Semiconductor

產品分類: Wet Process Control

製造商: HORIBA Advanced Techno Co., Ltd.

概要
配置

Wide-range Compatibility
Measurement is possible in the TMAH concentration range of 0.000% to 10.00% with automatic decimal point adjustment.

Automatic Switching of Display Range
Automatically switches the display range from high to low concentration. Furthermore, it is feasible to monitor changes while preserving effective conductivity resolution.

Sensor with Excellent Chemical Resistance
This sensor employs a chemically resistant 4-pole flow-through glass carbon sensor.

3 Measurements
Capable of three types of measurements: TMAH concentration, conductivity, and temperature.

Concentration Conversion Function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics. It is particularly suitable for dilution management of low-concentration chemicals.

Indication Converter

Model	HE-960H-TM
Measurement range	0 - 10%
Ambient environment	Temperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation)
Power supply	24 V DC ±10%, 10 W (max.)
Protective structure	Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
Mass	Approx. 550 g
Conforming standards	CE marking, FCC Part 15
Compatible sensors	FES-510 series (flow-type carbon sensor)

Schematics

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