HE-960H-TM-S

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

高精準度TMAH濃度監測儀

高精度 TMAH 濃度監測儀，非常適合顯影液 TMAH 濃度管理。

採用高度耐化學腐蝕的碳感測器，可高精度測量光阻顯影劑溶液的主要成分TMAH濃度。

事業部: Semiconductor

產品分類: Wet Process Control

製造商: HORIBA Advanced Techno Co., Ltd.

概要
配置

High Precision
Concentration: 0–3%, Conductivity: 0–1000 mS/cm, Repeatability: Capable of TMAH concentration measurements within ±0.003wt%

Automatic Switching for Display Range
Automatic switching of display range from high concentration to low concentration. Additionally, it is possible to monitor changes while maintaining effective conductivity resolutions.

3 Measurements
Capable of three measurements, TMAH concentration, conductivity, and temperature.

Concentration Conversion Function
Concentration conversion is possible by inputting the relationship between the chemical concentration and conductivity along with temperature characteristics. It is particularly suited for the dilution management of low-concentration chemicals.

Model name	HE-960H-TM-S
Target of measurement	TMAH
Measurement range	Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm
Repeatability	Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)
Linearity	Within +/- 0.003wt% (Using equivalent input for conductivity)
Transmission output	Number of output: 4
Contact output	Outputs: 5 points
Communication output	RS-485
Power supply	24V DC +/- 10% 10W
Compatible sensor	FES-510 Series
Wetted material of sensor	GC, PFA, Karletz®

Schematics

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