HE-960HC

碳感測器電導率儀（高濃度型）

高濃度電導率計非常適合半導體製造和 FPD（平板顯示器）製造過程中的化學溶液和廢水管理。

本裝置採用耐化學腐蝕的 4 極碳感測器。它無需實際切換即可進行大範圍測量，並配備濃度轉換功能，適合測量半導體清洗等製程中使用的多種化學品的電導率。

製造商: HORIBA Advanced Techno Co., Ltd.

Wide-range Compatible
Capable of measuring up to 1000 mS/cm. (The measurement range of conductivity before temperature compensation)

Automatic Switching for Display Range
Automatically switching display range from high concentration to low concentration. Furthermore, it is possible to monitor changes while maintaining effective conductivity resolution.

Concentration Conversion Function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics.

High Quality Chemical-resistant Sensor
A chemical-resistant 4-pole carbon sensor is in use, making it compatible with a wide range of chemical solutions used in semiconductor cleaning processes.

Model	HE-960HC
Measurement range	0 - 1000mS/cm
Wetted materials	GC, Karletz, PFA
Sensor input	1 ch
Repeatability	+/- 0.5% of the full scale (in equivalent input)
Linearity	+/- 0.5% of the full scale (in equivalent input)
Transmission output	Number of output: 4
Contact output	Outputs: 5 points
Communication output	RS-485
Ambient environment	Temperature: -5 to 45°C, Relative humidity: 20 to 85% (without condensation)
Power supply	100 to 240 V AC ±10%, 50/60 Hz, 20 VA (max)
Protective structure	Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
Mass	Approx. 550 g
Conforming standards	CE marking, FCC Part 15
Compatible sensors	FES-510 series