HZ-960

Dissolved Ozone Monitor

A dissolved ozone concentration monitor designed for semiconductor devices, wet processing for liquid crystal and glass.

Accommodating low-concentration chemical treatment, it is ideal for measuring a wide range of dissolved ozone concentrations, up to a maximum of 500 ppm.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Abundant measurement options
In addition to the standard measurement range of 0-100 mg/L for ozone, it offers three additional measurement ranges. Suggestions for the optimal range is provided.

Choice of pipe sizes
In addition to the standard 3/4 inch, choices can be made from 1/2 inch and 1 inch sizes.

High reproducibility accuracy and stability accuracy
Reproducibility accuracy within FS +/- 0.2%.

Corresponding detector	ZH-10	ZH-40	ZH-100	ZH-500
Measurement range	0 - 10.00mg/L	0 - 40.00mg/L	0 - 100mg/L	0 - 500mg/L
Supply temperature	5 - 30 deg.C			5 - 80 deg.C
Chemical contact material of detector	PFA, PTFE, quartz glass
Supply pressure	Within 0.5 MPa
Repeatability	+/- 0.2% of full scale
Linearity	+/- 1.0% of full scale
Transmission output	Number of output: 2
Contact output	Number of output: 5
Contact input	Number of input: 2
Communication output	RS-485
Power supply	Rated voltage 24 +/- 10% V DC, 15W