| Model name | HF-700A |
|---|---|
| Measurement method | Fluoride ion electrode method |
| Measurement range | 0 - 1000mg/L (0 - 100/200/500/1000mg/L) |
| Repeatability | Within +/- 2% of the full scale |
| Stability | Within +/- 2% of the full scale/10 min. |
HF-700A
Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide
A trace fluorine concentration monitor for managing ppm-levels of hydrofluoric acid in sulfuric acid and hydrogen peroxide during the wet processes.
Enabling effective process management by continuously and stably measuring the fluorine concentration in sulfuric acid, hydrogen peroxide, and trace hydrofluoric acid at the ppm level. This is particularly valuable for the removal of polymer residues following etching processes.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
Achievement of stable continuous measurements
Continuous measurements of trace hydrofluoric acid concentration in sulfuric acid and hydrogen peroxide has been achieved through the use of an automatic neutralization function for the continuous neutralization of sample water and innovative technology developed for the fluoride ion electrode.
Selectable measurement modes according to the application
Choices can be made between the NORMAL MODE that prioritizes response speed and the ECO MODE that conserves reagent consumption based on your needs. In addition to continuous real-time concentration measurements, it is possible to select intermittent measurements.
Equipped with an automatic calibration function
Automatic calibration can be performed through the front-panel touch screen or external input signals to the monitor.
Reduction in the frequency of chemical replacement
The automatic switching function between two neutralization tanks helps to reduce the frequency of chemical replacements.